Cost-effective cleaning and high-quality thin gate oxides-Reference-Cited by-同舟云学术

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Cost-effective cleaning and high-quality thin gate oxides

Published:1999-05 Issue:3 Volume:43 Page:339-350
ISSN:0018-8646
Container-title:IBM Journal of Research and Development
language:
Short-container-title:IBM J. Res. & Dev.

Author:

Heyns M. M.,Bearda T.,Cornelissen I.,DeGendt S.,Degraeve R.,Groeseneken G.,Kenens C.,Knotter D. M.,Loewenstein L. M.,Mertens P. W.,Mertens S.,Meuris M.,Nigam T.,Schaekers M.,Teerlinck I.,Vandervorst W.,Vos R.,Wolke K.

Publisher

IBM

Subject

General Computer Science

Cited by 41 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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5. Atomic layer deposition of scandium-based oxides;physica status solidi (a);2013-11-27

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