Author:
White Brian,Knorr Andreas,Engbrecht Ward,Kastenmeier Bernd,Das Sanjit,McGowan Ricky,Satyanarayana Sri,Gallagher Michael
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference4 articles.
1. White et al., Proceedings of the Advanced Metallization Conference, 2004, p. 122.
2. M. Fayolle et al., Proceedings of the IITC, 2004, p. 208.
3. International Technology Roadmap for Semiconductors, Semiconductor Industry Association, 2003.
4. Investigation of ash damage to ultralow-k inorganic materials
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