Author:
Fitz C.,Goldbach M.,Dupont A.,Schmidbauer S.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Cited by
19 articles.
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1. Effects of Kr sputtering on ultrathin PtHfSi film formation;Japanese Journal of Applied Physics;2014-01-01
2. Kinetic study on hot-wire-assisted atomic layer deposition of nickel thin films;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2014-01
3. Back End of the Line;Atomic Layer Deposition for Semiconductors;2013-10-19
4. Thermal evolution of the morphology of Ni/Ag/Si(111)-√3×√3 surface;Thin Solid Films;2012-08
5. Improvements to bit line contact processing in trench DRAM;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2011-11