Electrical characterization of flexible hafnium oxide capacitors on deformable softening polymer substrate-Reference-Cited by-同舟云学术

Electrical characterization of flexible hafnium oxide capacitors on deformable softening polymer substrate

Published:2021-09 Issue: Volume:249 Page:111618
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Rodriguez-Lopez Ovidio,Guerrero Ruiz Edgar,Polednik Alexander J.,Duran-Martinez Adriana C.,Garcia-Sandoval Aldo,Voit Walter,Gutierrez-Heredia Gerardo

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

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