Rational Design and Fabrication of Block Copolymer Templated Hafnium Oxide Nanostructures-Reference-Cited by-同舟云学术

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Rational Design and Fabrication of Block Copolymer Templated Hafnium Oxide Nanostructures

Published:2024-01-30 Issue:3 Volume:36 Page:1591-1601
ISSN:0897-4756
Container-title:Chemistry of Materials
language:en
Short-container-title:Chem. Mater.

Author:

Cai Ruoke¹,Weisbord Inbal¹,Caspi Shaked²^ORCID,Naamat Lilach¹,Kornblum Lior²^ORCID,Dana Alon Grinberg¹^ORCID,Segal-Peretz Tamar¹^ORCID

Affiliation:

1. The Wolfson Department of Chemical Engineering, Technion, Haifa 3200003, Israel

2. The Andrew and Erna Viterbi Faculty of Electrical and Computer Engineering, Technion, Haifa 3200003, Israel

Funder

Israel Science Foundation

Publisher

American Chemical Society (ACS)

Link

https://pubs.acs.org/doi/pdf/10.1021/acs.chemmater.3c02836

Reference64 articles.

1. High-K materials and metal gates for CMOS applications

2. Dielectric properties of dysprosium- and scandium-doped hafnium dioxide thin films

3. Electronic properties of hafnium oxide: A contribution from defects and traps

4. Optical properties of a-HfO2 thin films

5. A study on structural, optical and hydrophobic properties of oblique angle sputter deposited HfO2 films

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. The Development and Atomic Structure of Zinc Oxide Crystals Grown within Polymers from Vapor Phase Precursors;ACS Nano;2024-07-03

2. Sequential Infiltration Synthesis of Al₂O₃ in PMMA Thin Films: Temperature Investigation by Operando Spectroscopic Ellipsometry;ACS Applied Materials & Interfaces;2024-06-28

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