Author:
Gottfried K.,Schubert I.,Schulz S.E.,Gessner T.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
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3. Semiconductor Industry Association (Ed.), The International Technology Roadmap for Semiconductors (2005) .
4. Chemical Mechanical Planarization of Microelectronic Materials;Steigerwald,1997
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21 articles.
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