Copper metallization for ULSL and beyond

Author:

Murarka Shyam P.,Hymes Steven W.

Publisher

Informa UK Limited

Subject

Electrical and Electronic Engineering,Physical and Theoretical Chemistry,Condensed Matter Physics,General Chemical Engineering,Electronic, Optical and Magnetic Materials

Reference160 articles.

1. Huntington, H. B. 1975.Diffusion in Solids - Recent Developmenrs, Edited by: Nowick, A. S. and Burton, J. J. 303New York: Academic Press.

2. Peterson, N. L. 1975.Diffusion in Solids - Recent Developments, Edited by: Nowick, A. S. and Burton, J. J. 116New York: Academic Press.

3. Murarka, S. P. March 3 to 5 1994.Proc. Int. Conf. Adv. Microelectronic Devices and Processing, March 3 to 5, 321Sendai, Japan: Tohoku University.

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