Oxygen mediated defect evolution in RF sputtered Ga2O3 thin films on p-Si substrate-Reference-Cited by-同舟云学术

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Oxygen mediated defect evolution in RF sputtered Ga2O3 thin films on p-Si substrate

Published:2022-12 Issue: Volume:33 Page:104766
ISSN:2352-4928
Container-title:Materials Today Communications
language:en
Short-container-title:Materials Today Communications

Author:

Bhowmick Sangita,Saha Rajib,Mishra Madhuri,Sengupta Ankita,Chattopadhyay Sanatan,Chakrabarti Subhananda

Funder

Indian Institute of Technology Bombay

Publisher

Elsevier BV

Subject

Materials Chemistry,Mechanics of Materials,General Materials Science

Reference47 articles.

1. Structural, optical and photoluminescence properties of Pr-doped β-Ga2O3 thin films;Li;J. Alloy. Compd.,2017

2. A review of Ga2O3 materials, processing, and devices;Pearton;Appl. Phys. Rev.,2018

3. 3.8-MV/cm Breakdown Strength of MOVPE-Grown Sn-Doped $\beta $-Ga 2 O 3 MOSFETs;Green;IEEE Electron Device Lett.,2016

4. High-performance high-temperature solar-blind photodetector based on polycrystalline Ga2O3 film;Zhou;J. Alloy. Compd.,2020

5. High breakdown electric field in β-Ga2O3/graphene vertical barristor heterostructure;Yan;Appl. Phys. Lett.,2018

Cited by 14 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Improved Ga2O3 films on variously oriented Si substrates with Al2O3 or HfO2 buffer layer via atomic layer deposition;Micro and Nanostructures;2024-09

2. Reduction of oxygen vacancies in Mg–N codoped Ga2O3 films for improving solar-blind UV photodetectors performance;Materials Science in Semiconductor Processing;2024-07

3. Oxygen vacancies modulating performance for Ga2O3 solar-blind photodetectors via low-cost mist chemical vapor deposition;Materials Today Communications;2024-06

4. Influence of particle size distribution on dielectric, electrical, and microstructural properties of aerosol-deposited Ga2O3 film for advanced electronic device;Ceramics International;2024-05

5. Low-temperature photoluminescence characteristic of Tm-doped Ga2O3 films for light emitting diodes application;Optical Materials;2024-04

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