Microsystems elements based on free-standing thick-films made with a new sacrificial layer process-Reference-Cited by-同舟云学术

Microsystems elements based on free-standing thick-films made with a new sacrificial layer process

Published:2008-06 Issue:6 Volume:48 Page:872-875
ISSN:0026-2714
Container-title:Microelectronics Reliability
language:en
Short-container-title:Microelectronics Reliability

Author:

Lucat Claude,Ginet Patrick,Castille Christophe,Debéda Hélène,Ménil Francis

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Safety, Risk, Reliability and Quality,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference10 articles.

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4. A ceramic capacitive pressure microsensor with screen-printed diaphragm;Sippola;In: Proceedings of the 4th IEEE conference on sensors,2005

5. Processing of graphite-based sacrificial layer for microfabrication of low temperature co-fired ceramics (LTCC);Birol;Sensor Actuator A,2006

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