New corn-based sacrificial layer for MEMS based on screen-printed PZT ceramics

Author:

Grall Simon,Santawitee Onuma,Dufour Isabelle,Aubry Vincent,Debéda Hélène

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference29 articles.

1. The preparation and characterization of porous alumina ceramics using an eco-friendly pore-forming agent;Alzukaimi;Int. J. Appl. Ceram. Technol.,2019

2. Semi-automated procedure of digitalization and study of rock thin section porosity applying optical image analysis tools;Berrezueta;Comput. Geosci.,2019

3. PZT consolidation by Spark Plasma Sintering (SPS);Chinen;21st International Congress of Mechanical Engineering, vol. 1050,2011

4. Properties of PZT thick film made on LTCC substrates with dielectric intermediate layers;D¸abrowski;14th International Conference on Optical and Electronic Sensors, vol. 10161,2016

5. Printed piezoelectric materials for vibration-based damage detection;Debéda;Proc. Eng.,2016

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