Metal-layer capacitors in the 65nm CMOS process and the application for low-leakage power-rail ESD clamp circuit-Reference-Cited by-同舟云学术

Metal-layer capacitors in the 65nm CMOS process and the application for low-leakage power-rail ESD clamp circuit

Published:2014-01 Issue:1 Volume:54 Page:64-70
ISSN:0026-2714
Container-title:Microelectronics Reliability
language:en
Short-container-title:Microelectronics Reliability

Author:

Chiu Po-Yen,Ker Ming-Dou

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Safety, Risk, Reliability and Quality,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference26 articles.

1. Fractal capacitors;Samavati;IEEE J Solid-State Circ,1998

2. Analog characteristics of metal–insulator–metal capacitors using PECVD nitride dielectrics;Babcock;IEEE Electr Dev Lett,2001

3. A high performance MIM capacitor using HfO2 dielectrics;Hu;IEEE Electr Dev Lett,2002

4. Kim J, Plouchart J, Zamdmer N, Sherony M, Lu L.-H., Tan Y, Yoon M, Jenkins K, Kumar M, Ray A, Wagner L. 3-dimensional vertical parallel plate capacitors in an SOI CMOS technology for integrated RF circuits. In: Symp. VLSI Circuits Dig. Tech. Papers, 2003. p. 29–32.

5. Voldman S, Gebreselasie E, He Z.-X., ESD testing of aluminum and copper vertical parallel plate (VPP) capacitor structures, In: Proc IEEE Int. Reliab. Phys. Symp. 2007. p. 586–87.

Cited by 24 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A Low-Power In-Memory Multiplication and Accumulation Array With Modified Radix-4 Input and Canonical Signed Digit Weights;IEEE Transactions on Very Large Scale Integration (VLSI) Systems;2023-11

2. Acoustic scene analysis using analog spiking neural network;Neuromorphic Computing and Engineering;2022-10-11

3. `Failure analysis of short-circuit failure of metal-oxide-metal capacitor;Microelectronics Reliability;2022-10

4. High-Q On-Chip Capacitors Featuring “Self-Inductance Cancellation” for RF and mm-Wave Applications;IEEE Microwave and Wireless Components Letters;2022-06

5. The Design Methodology of Fully Digital Pulse Width Modulation;Journal of Low Power Electronics and Applications;2021-10-21