Fast wafer level reliability monitoring as a tool to achieve automotive quality for a wafer process-Reference-Cited by-同舟云学术

Fast wafer level reliability monitoring as a tool to achieve automotive quality for a wafer process

Published:2016-09 Issue: Volume:64 Page:2-12
ISSN:0026-2714
Container-title:Microelectronics Reliability
language:en
Short-container-title:Microelectronics Reliability

Author:

Martin A.,Vollertsen R.-P.,Mitchell A.,Traving M.,Beckmeier D.,Nielen H.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Safety, Risk, Reliability and Quality,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference54 articles.

1. An introduction to fast wafer level reliaility monitoring for integrated circuit mass production;Martin;Microelectron. Reliab.,2004

2. Some practical considerations for effective and efficient wafer-level reliability control;Tseng;Microelectron. Reliab.,2004

3. Special interest group: fast Wafer Level Reliability monitoring;Martin,2007

4. Discussion group: fast Wafer Level Reliability (fWLR) monitoring;Martin,2008

5. Discussion group: fast Wafer Level Reliability (fWLR) monitoring;Martin,2009

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