Thermodynamic assessment of the Al–Sc–N ternary system and phase-separated region of the strained wurtzite phase
Author:
Funder
AIST
Japan Society for the Promotion of Science
Publisher
Elsevier BV
Subject
Materials Chemistry,Ceramics and Composites
Reference61 articles.
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4. Aluminum scandium nitride thin-film bulk acoustic resonators for wide band applications;Moreira;Vacuum,2011
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