AlN-based sputter-deposited shear mode thin film bulk acoustic resonator (FBAR) for biosensor applications — A review
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference42 articles.
1. Synthesis of textured thin piezoelectric AlN films with a nonzero C-axis mean tilt for the fabrication of shear mode resonators
2. Temperature compensation of liquid FBAR sensors
3. Immunosensor utilizing a shear mode thin film bulk acoustic sensor
4. Mass sensitivity of multilayer thin film resonant BAW sensors
5. Shear mode AlN thin film electro-acoustic resonant sensor operation in viscous media
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