Author:
Jiang Yu-Sen,Huang Kuei-Wen,Yi Sheng-Han,Wang Chin-I,Chang Teng-Jan,Kao Wei-Chung,Wang Chun-Yuan,Yin Yu-Tung,Shieh Jay,Chen Miin-Jang
Funder
Ministry of Science and Technology, Taiwan
Taiwan Semiconductor Manufacturing Company
Subject
Materials Chemistry,Ceramics and Composites
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