Author:
Kasten Klaus,Kordas Norbert,Kappert Holger,Mokwa Wilfried
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference8 articles.
1. Pasqualina M. Sarro, Silicon carbide as a new MEMS technology, in: Proceedings of the Transducers’99, Sendai, Japan, 1999, pp. 186–189.
2. SOI, SIMOX, from bulk to surface micro-machining, a new age for silicon sensors and actuators;Diem;Sens. Actuators,1995
3. Capacitive differential pressure sensor for harsh environments;Moe;Sens. Actuators,2000
4. CMOS-compatible capacitive high temperature pressure sensors;Kasten;Sens. Actuators,2000
5. Surface micromachined pressure sensors with integrated CMOS read-out electronics (Transducers’93, Yokohama 1993);Dudaicevs;Sens. Actuators A,1994
Cited by
24 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献