Author:
Dudaicevs H.,Kandler M.,Manoli Y.,Mokwa W.,Spiegel E.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference17 articles.
1. Silicon as a mechanical material
2. C. Linder, L. Paratte, M.-A. Grétillat, V.P. Jaecklin and N.F. de Rooij, Surface micromachining, Proc. Third European Workshop Micromachining, Micromechanics and Microsystems, Leuven, Belgium, 1992, pp. 43–55
3. Polycrystalline Silicon Micromechanical Beams
4. Polycrystalline silicon micromachining: A new technology for integrated sensors
5. Y.-C. Tai, L.-S. Fan and R.S. Muller, IC-processed micromotors: design, technology and testing, Proc. 2nd Workshop Micro Electro Mech. Syst., Salt Lake City, UT, USA, 1989, pp. 1–6
Cited by
69 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献