Author:
Moe S.T,Schjølberg-Henriksen K,Wang D.T,Lund E,Nysæther J,Furuberg L,Visser M,Fallet T,Bernstein R.W
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
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4. Methods for the fabrication of convex corners in anisotropic etching of 〈100〉 silicon in aqueous KOH;Offereins;Sensors and Actuators, A,1991
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