High-Sensitivity Saw Pressure Sensor Based on Single Crystal Linbo3 Film with Silicon Cavities

Author:

Fu Wenxiao,Qiao Xiaojun,Bi Kaixi,Li Tao,Liu Yukai,Zhang Huiyi,Niu Liya,Mei Linyu,Guo Tao,Chou Xiujian,Geng wenping

Publisher

Elsevier BV

Reference35 articles.

1. A Passive Wireless Microelectromechanical Pressure Sensor for Harsh Environments;J E Rogers;Journal of Microelectromechanical Systems,2018

2. A fiber bragg grating pressure sensor with temperature compensation based on diaphragm-cantilever structure;M.-F Liang;Optik,2017

3. Enhanced sensitivity of piezoelectric pressure sensor with microstructured polydimethylsiloxane layer;W Choi;Applied Physics Letters,2014

4. Sensitivity Optimization of MEMS Based Piezoresistive Pressure Sensor for Harsh Environment;P Verma;Silicon,2020

5. Highly sensitive capacitive pressure sensor with elastic metallized sponge;Y Zhang;Smart Materials and Structures,2019

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