Fabrication and investigation of in-plane compliant SU8 structures for MEMS and their application to micro valves and micro grippers-Reference-Cited by-同舟云学术

Fabrication and investigation of in-plane compliant SU8 structures for MEMS and their application to micro valves and micro grippers

Published:2002-04 Issue: Volume:97-98 Page:457-461
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Seidemann Volker,Bütefisch Sebastian,Büttgenbach Stephanus

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference17 articles.

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2. S. Bütefisch, V. Seidemann, S. Büttgenbach, A new micro-pneumatic actuator for micromechanical systems, in: Proceedings of the Transducers 2001, 2C2.11P.

3. S. Bütefisch, S. Büttgenbach, T. Kleine-Besten, S. Loheide, U. Brand, Silicon three-axial tactile sensor for micromaterial characterization, in: Proceedings of the 3rd International Conference for Micromaterials, Micromat 2000, Berlin, 2000, pp. 420–427.

4. K.Y. Lee, N. LaBianca, S.A. Rishton, S. Zolgharnain, J.D. Gelorme, J. Shaw, T.H.P. Chang, Micromachining applications of a high resolution ultrathick photoresist, J. Vac. Sci. Technol. B (1995) 3012–3016.

5. L.J. Guerin, A. Torosdagi, P. Eichenberger, P. Renaud, High aspect ratio planar coils embedded in SU8 photoepoxy for MEMS applications, in: Proceedings of the Eurosensors 98, 1998, Vol. 1, pp. 11–14.

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