A New Micro Pneumatic Actuator for Micromechanical Systems-Reference-Cited by-同舟云学术

A New Micro Pneumatic Actuator for Micromechanical Systems

Published:2001 Issue: Volume: Page:722-725
ISSN:
Container-title:Transducers ’01 Eurosensors XV
language:
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Author:

Bütefisch Sebastian,Seidemann Volker,Büttgenbach Stephanus

Publisher

Springer Berlin Heidelberg

Link

http://link.springer.com/content/pdf/10.1007/978-3-642-59497-7_172

Reference6 articles.

1. M. Madou, “Fundamentals of microfabrication”, CRC Press, Boca Raton, New York, 1997

2. S. Büttgenbach: “Mikromechanik — Einführung in Technologie und Anwendung”, Teubner, Stuttgart, 2.ed., 1994

3. S. Bütefisch, G. Pokar, S. Büttgenbach, J. Hesselbach, “A new SMA actuated miniature silicon gripper for micro assembly”, Actuator 2000, pp. 334–337, Bremen, 2000

4. S. Bütefisch, S. Büttgenbach, “New differential-type SMA actuator for a miniature silicon gripper”, Smart material and MEMS, Proceedings of the SPIE, Melbourne, 2000, in print

5. V. Seidemann, S. Bütefisch, S. Büttgenbach, “Application and investigation of in-plane compliant SU8-structures for MEMS”, Transducers 2001, paper 4c301

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