Compact curved-edge displacement sensor-embedded spindle system for machining process monitoring-Reference-Cited by-同舟云学术

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Compact curved-edge displacement sensor-embedded spindle system for machining process monitoring

Published:2021-04 Issue: Volume:64 Page:1255-1260
ISSN:1526-6125
Container-title:Journal of Manufacturing Processes
language:en
Short-container-title:Journal of Manufacturing Processes

Author:

Kim Jungsub,Lee Seungjoo,Chun Heebum,Lee ChaBum^ORCID

Funder

U.S. Department of Commerce

National Institute of Standards and Technology Physics Laboratory

National Institute of Standards and Technology

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Management Science and Operations Research,Strategy and Management

Reference15 articles.

1. Rolling bearing-suspended spindle run-out control using repetitive control and adaptive feedforward cancellation. Inter feedforward cancellation;Kim;Int J Precis Eng Manuf,2013

2. Precision spindle metrology;Marsh,2010

3. Guidelines for machine tool sensing and smart manufacturing integration;Costa;Procedia Manuf,2020

4. An optical measurement technique for dynamic stiffness and damping of precision spindle system;Lee;Measurement,2019

5. A curved edge diffraction-utilized displacement sensor for spindle metrology;Lee;Rev Sci Instrum,2016

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1. Wafer Edge Metrology and Inspection Technique Using Curved-Edge Diffractive Fringe Pattern Analysis;Journal of Manufacturing Science and Engineering;2024-06-10

2. Hole Edge Metrology and Inspection by Edge Diffractometry;Journal of Manufacturing Science and Engineering;2024-04-29

3. Precise measurement of geometric and physical quantities in cutting tools inspection and condition monitoring: A review;Chinese Journal of Aeronautics;2023-08

4. A differentially amplified Hall effect displacement sensor for positioning control of a long-range flexure stage;Review of Scientific Instruments;2023-07-01

5. Curved-edge diffractive fringe pattern analysis for wafer edge metrology and inspection;Metrology, Inspection, and Process Control XXXVII;2023-04-27

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