Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference9 articles.
1. Capacitive sensors: when and how to use them;Puers;Sensors and Actuators A,1993
2. A novel 3-axis monolithic silicon accelerometer;Andersson,1995
3. Three dimensional vector accelerometer using SOI structure for high temperature;Takao,1995
4. Three axis capacitive accelerometer with uniform axial sensitivities;Mineta;J. Micromech. Microeng.,1996
5. Three axis piezoresistive accelerometer using polysilicon layer;Kwon,1997
Cited by
30 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献