A novel non-vacuum packaged triaxial accelerometer with differential dual-axis resonantors and torsional elements
Author:
Funder
National Natural Science Foundation of China
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
https://link.springer.com/content/pdf/10.1007/s00542-023-05538-2.pdf
Reference23 articles.
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3. Caspani A, Comi C, Corigliano A, Langfelder G, Zega V, Zerbini S (2014) A differential resonant micro accelerometer for out-of-plane measurements, 28th European conference on solid-state transducers (EUROSENSORS 2014), pp. 640–3
4. Chau KHL, Lewis SR, Zhao Y, Howe RT, Bart SF, Marcheselli RG (1996) An integrated force-balanced capacitive accelerometer for low-g applications. Sens Actuators, A Phys 54:472–476
5. Comi C, Corigliano A, Zega V, Zerbini S (2016) Non linear response and optimization of a new z-axis resonant micro-accelerometer. Mechatronics 40:235–243
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