Subject
Electrical and Electronic Engineering,Computer Science Applications,Mechanical Engineering,Control and Systems Engineering
Reference19 articles.
1. A resonant micro accelerometer based on electrostatic stiffness variation;Comi;Meccanica,2013
2. Mechanical characterization of epitaxial silicon through on chip tensile tests;Corigliano;J Microelectromech Syst,2004
3. Mems reliability review;Huang;IEEE Trans Device Mater Reliab,2012
4. Analysis of mems accelerometer for optimized sensitivity;Khamil;J Eng Technol,2014
5. Area minimization of a three-axis separate mass capacitive accelerometer using the thelma process;Briffa,2013
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