An integrated force-balanced capacitive accelerometer for low-g applications-Reference-Cited by-同舟云学术

An integrated force-balanced capacitive accelerometer for low-g applications

Published:1996-06 Issue:1-3 Volume:54 Page:472-476
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Chau K.H.-L,Lewis S.R,Zhao Y,Howe R.T,Bart S.F,Marcheselli R.G

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference6 articles.

1. Fabrication technology for an integrated surface micromachined sensor;Core;Solid State Technol.,1993

2. A low cost monolithic accelerometer; product/technology update;Sherman,1992

3. Design rules for a reliable surface micromachined IC sensor;Bart,1995

4. Surface micromachined, digitally force-balanced accelerometer with integrated CMOS detection circuitry;Yun,1992

5. A monolithic surface micromachined accelerometer with digital output;Lu,1995

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