Author:
Pedersen Michael,Olthuis Wouter,Bergveld Piet
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference24 articles.
1. A. Kovács and A. Stoffel, Integrated condenser microphone with polysilicon electrodes, Proc. Micromechanics Europe 1995 (MME '95), Copenhagen, Denmark, 1995, pp. 132–135.
2. J.J. Bernstein and J.T. Borenstein, A micromachined silicon condenser microphone with on-chip amplifier, Proc. Solid-State Sensor and Actuator Workshop, Hilton Head, SC, USA, 1996, pp. 239–243.
3. A.G.H. van der Donk, J.A. Voorthuyzen and P. Bergveld, General considerations of noise in microphone preamplifiers, Sensors and Actuators A, 25–27 (1991) 515–520.
4. D. Hohm and G. Hess, A subminiature condenser microphone with silicon nitride membrane and silicon back plate, J. Acoust. Soc. Am., 85 (1989) 476–480.
5. J. Bergqvist and F. Rudolf, A new condenser microphone in silicon, Sensors and Actuators, A21–A23 (1990) 123–125.
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