A non-dimensional time-domain lumped model for externally DC biased capacitive microphones with two electrodes

Author:

Printezis GeorgiosORCID,Aage NielsORCID,Lucklum FriederORCID

Funder

Technical University of Denmark

Publisher

Elsevier BV

Subject

Acoustics and Ultrasonics

Reference22 articles.

1. Irreversibility and generalized noise;Callen;Phys Rev,1951

2. On the acoustical resistance due to viscous losses in the air gap of electrotastic transducers;Skvor;Ultrasonics,1969

3. Squeeze-film damping in solid-state accelerometers;Starr,1990

4. A silicon condenser microphone with a highly perforated backplate;Bergqvist,1991

5. Mechanical-thermal noise in micromachined acoustic and vibration sensors;Gabrielson;IEEE Trans Electron Devices,1993

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