Evaluation of Polymer Materials for MEMS Microphones-Reference-Cited by-同舟云学术

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Evaluation of Polymer Materials for MEMS Microphones

Published:2022-08 Issue:4 Volume:31 Page:673-682
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Kim Junsoo¹^ORCID,Lee Siyoung²,Bae Geun Yeol³,Moon Wonkyu¹^ORCID

Affiliation:

1. Department of Mechanical Engineering, Pohang University of Science and Technology, Pohang, South Korea

2. Department of Chemical Engineering, Pohang University of Science and Technology, Pohang, South Korea

3. Department of Material Design Engineering, Kumoh National Institute of Technology (KIT), Gumi, South Korea

Funder

Tech Incubator Program for Startup

Ministry of Small and Medium-sized Enterprises (SMEs) and Startups

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx7/84/9847109/09784109.pdf?arnumber=9784109

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Recent advancements in physical and chemical MEMS sensors;The Analyst;2024

2. A Grating Interferometric Acoustic Sensor Based on a Flexible Polymer Diaphragm;Sensors;2023-12-18

3. Laser-Processed Protective Glass Micromesh Chips for Acoustic MEMS Sensors;IEEE Sensors Journal;2023-12-15

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