A Low-Cost Fabrication and Numerical Simulation of a MEMS Acoustic Transducer Using Polyimide Membrane on FR4 Substrate-Reference-Cited by-同舟云学术

A Low-Cost Fabrication and Numerical Simulation of a MEMS Acoustic Transducer Using Polyimide Membrane on FR4 Substrate

Author:

Karthikeyan K.^ORCID,Sujatha L.,Sundar R.

Publisher

Springer Science and Business Media LLC

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

Reference33 articles.

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2. P.-C. Hsu, C. H. Mastrangelo, and K. D. Wise, IEEE, pp. 580–585.

4. J. Czarny, T. Verdot, E. Redon, A. Walther, H. Lhermet, B. Desloges, K. Ege, P. Robert, J.-L. Guyader, CFA, Poitiers, (2014).

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