Local structure and bonds of amorphous silicon oxynitride thin films-Reference-Cited by-同舟云学术

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Local structure and bonds of amorphous silicon oxynitride thin films

Published:2002-06 Issue:1-2 Volume:413 Page:59-64
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Scopel W.L,Fantini M.C.A,Alayo M.I,Pereyra I

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference44 articles.

1. Results of monolithic integration of optical waveguides, photodiodes and CMOS circuits on silicon

2. Investigation of thick, low‐temperature plasma deposited silica films for waveguide fabrication

3. SiH bonding configuration in SiOx: N,H films deposited by chemical vapor deposition

4. High quality low temperature DPECVD silicon dioxide

5. Composition-density and refractive index relations in PECVD silicon oxynitrides thin films

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