Results of monolithic integration of optical waveguides, photodiodes and CMOS circuits on silicon-Reference-Cited by-同舟云学术

Results of monolithic integration of optical waveguides, photodiodes and CMOS circuits on silicon

Published:1992-09 Issue:1-4 Volume:19 Page:211-214
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Hilleringmann U.,Goser K.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference7 articles.

1. A Silicon Based Technology for Monolithic Integration of Waveguides and VLSI CMOS Circuits;Hilleringmann,1991

2. A Method for Area Saving Planar Isolation Oxides Using Oxidation Protected Sidewalls;Kahng;J. Electrochemical Soc.,1980

3. High-Efficient Coupling Structures for Integrated Optic Electronic Circuits;Zurhelle,1991

4. Electrooptical Coupling of Waveguides and VLSI Circuits Integrated on One Silicon Chip;Adams,1992

5. A Silicon Technology for Monolithic Integration of Optical Waveguides, Photodetectors and VLSI CMOS Circuits;Hilleringmann,1992

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