Local order structure of a-SiOxNy:H grown by PECVD
Author:
Publisher
FapUNIFESP (SciELO)
Subject
General Physics and Astronomy
Link
http://www.scielo.br/pdf/bjp/v32n2a/a33v322a.pdf
Cited by 8 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
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5. Low-temperature direct bonding of silicon nitride to glass;RSC Advances;2018
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