Author:
Röseler Arnulf,Korte Ernst-Heiner
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference6 articles.
1. A. Röseler, Infrared Spectroscopic Ellipsometry, Akademie-Verlag, Berlin, 1990.
2. A. Röseler, Spektroskopische Infrarot-Ellipsometrie, in: H. Günzler et al. (Eds.), Analytiker Taschenbuch Bd. 14, Springer-Verlag, Berlin, 1996, p. 89.
3. Characterization of thin oxide-n itride double layers on silicon wafers by IR ellipsometry
4. Surface-near analyses of ultra thin silicon nitride layers by NRA, channeling RBS, FT IR ellipsometry and AFM
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