Surface-near analyses of ultra thin silicon nitride layers by NRA, channeling RBS, FT IR ellipsometry and AFM-Reference-Cited by-同舟云学术

Surface-near analyses of ultra thin silicon nitride layers by NRA, channeling RBS, FT IR ellipsometry and AFM

Published:1995 Issue:5-8 Volume:353 Page:734-739
ISSN:0937-0633
Container-title:Fresenius' Journal of Analytical Chemistry
language:en
Short-container-title:Fresenius J Anal Chem

Author:

Markwitz A.,Baumann H.,Grill W.,Heinz B.,R�seler A.,Krimmel E. F.,Bethge K.

Publisher

Springer Science and Business Media LLC

Subject

Biochemistry,Analytical Chemistry,Biochemistry

Link

http://link.springer.com/content/pdf/10.1007/BF00321360.pdf

Reference32 articles.

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3. Edelman FL, Kuznetsov ON, Lezheiko LV, Lubopytova V (1976) Rad Effects 29:13

4. Reeson KJ (1987) Nucl Instr Meth B19/20:269

5. Skorupa W, Wollschläger K, Kreissig U, Grötzschel R, Bartsch H (1987) Nucl Instr Meth B19/20:285

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