Author:
Endle J.P,Sun Y.-M,Nguyen N,Madhukar S,Hance R.L,White J.M,Ekerdt J.G
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference18 articles.
1. Variations of the leakage current density and the dielectric constant of Pt/(Ba,Sr)TiO3/Pt capacitors by annealing under a N2 atmosphere
2. R.B. Khamankar, M.A. Kressley, M.R. Visokay, T. Moise, G. Xing, S. Nemoto, Y. Okuno, S.J. Fang, A.M. Wilson, J.F. Gaynor, T.Q. Hurd, D.L. Crenshaw, S. Summerfelt, L. Colombo, IEDM Tech. Digest 1997, 245.
3. Process technology and integration challenges for high performance interconnects
4. Ir and Ru bottom electrodes for (Ba, Sr)TiO3 thin films deposited by liquid delivery source chemical vapor deposition
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