Ir and Ru bottom electrodes for (Ba, Sr)TiO3 thin films deposited by liquid delivery source chemical vapor deposition-Reference-Cited by-同舟云学术

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Ir and Ru bottom electrodes for (Ba, Sr)TiO3 thin films deposited by liquid delivery source chemical vapor deposition

Published:1998-06 Issue:1-2 Volume:323 Page:285-290
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Lee Won-Jae,Basceri C,Streiffer S.K,Kingon A.I,Doo-Young Yang ,Park Yung,Kim Ho-Gi

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference12 articles.

1. Memory cell and technology issues for 64- and 256-Mbit one-transistor cell MOSD DRAMs

2. Trends in the development of ULSI DRAM capacitors

3. Preparation of Pb(Zr,Ti)O3thin films on electrodes including IrO2

4. Integration technology of ferroelectrics and the performance of the integrated ferroelectrics

5. Electrical Comparison of Sol-Gel Derived Lead-Zirconate-Titanate Capacitors with Ir and Pt Electrodes

Cited by 19 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Investigation on the dielectric properties of (Ba, Sr)TiO3 thin films on hybrid electrodes;Materials Chemistry and Physics;2010-05

2. Study of leakage current in metal–insulator–metal Mg–Al co-doped barium strontium titanate thin films as a function of temperature and applied field;Thin Solid Films;2008-10

3. Ion beam sputter deposited TiAlN films for metal–insulator–metal (Ba,Sr)TiO3 capacitor application;Thin Solid Films;2008-09

4. Bottom electrodes dependence of microstructures and dielectric properties of compositionally graded (Ba1−xSrx)TiO3 thin films;Materials Research Bulletin;2008-03

5. The diffusion of Pt in BST films on Pt/Ti/SiO2/Si substrate by sol-gel method;Journal of Sol-Gel Science and Technology;2006-06-27

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