Calibration of step heights and roughness measurements with atomic force microscopes-Reference-Cited by-同舟云学术

Calibration of step heights and roughness measurements with atomic force microscopes

Published:2003-01 Issue:1 Volume:27 Page:91-98
ISSN:0141-6359
Container-title:Precision Engineering
language:en
Short-container-title:Precision Engineering

Author:

Garnaes J,Kofod N,Kühle A,Nielsen C,Dirscherl K,Blunt L

Publisher

Elsevier BV

Subject

General Engineering

Reference15 articles.

1. Industrial Uses of STM and AFM * *Contribution of the National Institute of Standards and Technology. Not subject to copyright except for illustrations taken from other sources.

2. New method to estimate step heights in scanning-probe microscope images;Edwards;Nanotechnology,1997

3. Influence of data analysis and other factors on the short-term stability of vertical scanning-probe microscope calibration measurements;Edwards;J. Vac. Sci. Technol. B,1998

4. Multivariate estimation of the systematic error of scanning probe microscopes;Rothe;Thin Solid Films,1995

5. Hüser D, Rothe H. Calibrating SPM with grid structures using statistically and geometrically obtained transformation functions. In: Proceedings of the Second Seminar on Quantitative Microscopy, November 1997; Wien, Austria, PTB-F-30.

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