Multivariate estimation of the systematic error of scanning probe microscopes-Reference-Cited by-同舟云学术

Multivariate estimation of the systematic error of scanning probe microscopes

Published:1995-08 Issue:2 Volume:264 Page:282-290
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Rothe Hendrik

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference8 articles.

1. H. Rothe, A. Duparré, P. Riedel and M. Timm, Real-time defect detection using multi-aperture fiber optic sensors and machine learning, Proc. SPIE 1989, in press.

2. H. Rothe, A. Duparré and H. Truckenbrodt, Real-time detection of surface damage by direct assessment of the BRDF, Proc. SPIE 1995, in press.

3. Multivariate Analysis;Dillon,1984

4. Numerical Recipes in C. The Art of Scientific Computing;Press,1990

5. A User's Guide to Principal Components;Jackson,1991

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