Precise lateral measurements of step height standards using Hamming area model

Author:

Abdelsalam Ibrahim Dahi Ghareab

Publisher

Elsevier BV

Subject

General Engineering

Reference18 articles.

1. The meaning and measure of vertical resolution in optical surface topography measurement;de Groot;Appl Sci,2017

2. Geometrical product specifications (GPS)-Surface texture: areal-Part 600: metrological characteristics for areal-topography measuring methods (DRAFT 2016-05-07),2016

3. Calibration of step heights and roughness measurements with atomic force microscopes;Garnaes;Precis Eng,2003

4. Multi-object investigation using two-wavelength phase-shift interferometry guided by optical frequency comb;Ibrahim;Appl Phys Lett,2018

5. High-precision 3-D surface topography measurement using high-stable multi-wavelength digital holography referenced by optical frequency comb;Ibrahim;Opt Lett,2018

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