Positioning control effectiveness of optical knife edge displacement sensor-embedded monolithic precision stage-Reference-Cited by-同舟云学术

Positioning control effectiveness of optical knife edge displacement sensor-embedded monolithic precision stage

Published:2015-09 Issue: Volume:233 Page:390-396
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Lee ChaBum,Lee Sun-Kyu,Tarbutton Joshua A.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference30 articles.

1. Multi-degree-of-freedom motion error measurement in an ultraprecision machine using laser encoder–Review;ChaBum Lee;J. Mech. Sci. Technol.,2013

2. Precision Nanometrology: Sensors and Measuring Systems for Nanomanufacturing;Gao,2010

3. S. Smith, Flexures: Elements of Elastic Mechanisms, Taylor & Francis, London England 2002.

4. High-bandwidth control of a piezoelectric nanopositioning stage in the presence of plant uncertainties;Alphale;Nanotechnology,2008

5. Invited review article: high-speed flexure-guided nanopositioning: mechanical design and control issues;Yong;Rev. Sci. Instrum.,2012

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