Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials
Reference94 articles.
1. A. H. Slocum, Precision machine design, Englewood Cliffs, NJ: Prentice-Hall (1992).
2. W. Gao, Precision Nanometrology: Sensors and Measuring Systems for Nanomanufacturing, Springer (2010).
3. J. G. Webster, The measurement, instrumentation, and sensors handbook, CRC Press LLC (1999).
4. O. Riemer, Advances in ultraprecision manufacturing, Proc. Jpn. Soc. Precis. Eng. (2011).
5. C. Lee, G. -H. Kim and S. -K. Lee, Design and construction of a single unit multi-function optical encoder for a six-degree-of-freedom motion error measurement in an ultraprecision linear stage, Meas. Sci. Technol., 22 (2011) 105901.
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