2D visual micro-position measurement based on intertwined twin-scale patterns

Author:

Guelpa Valérian,Sandoz Patrick,Vergara Miguel Asmad,Clévy Cédric,Le Fort-Piat Nadine,Laurent Guillaume J.

Funder

Labex ACTION

Région de Bourgogne-Franche-Comté

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference15 articles.

1. Micro-vision-based displacement measurement with high accuracy;Lu,2011

2. Displacement measurement with nanoscale resolution using a coded micro-mark and digital image correlation;Huang;Opt. Eng.,2014

3. Design of MEMS vision tracking system based on a micro fiducial marker;Kim;Sensors Actuat. A: Phys.,2015

4. In-plane displacement detection with picometer accuracy on a conventional microscope;Kokorian;J. Microelectromech. Syst.,2015

5. A vision-based measurement algorithm for micro/nano manipulation;Clark,2013

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