Displacement measurement with nanoscale resolution using a coded micro-mark and digital image correlation
Author:
Publisher
SPIE-Intl Soc Optical Eng
Subject
General Engineering,Atomic and Molecular Physics, and Optics
Reference28 articles.
1. Non-incremental interferometric displacement measurement using a laser Doppler sensor with phase coding
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5. Design of a Linear Variable Differential Transformer With High Rejection to External Interfering Magnetic Field
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4. Sensing One Nanometer Over Ten Centimeters: A Microencoded Target for Visual In-Plane Position Measurement;IEEE/ASME Transactions on Mechatronics;2020-06
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