Design of MEMS vision tracking system based on a micro fiducial marker

Author:

Kim Yong-SikORCID,Yang Seung Ho,Yang Kwang Woong,Dagalakis Nicholas G.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference27 articles.

1. Millipede-a MEMS-based scanning-probe data-storage system;Eleftheriou;IEEE Trans. Magn.,2003

2. Design, fabrication and testing of a serial kinematic MEMS XY stage for multifinger manipulation;Kim;J. Micromech. Microeng.,2012

3. Silicon-on-insulator out-of-plane electrostatic actuator with in situ capacitive position sensing;Wang;J. MicroNanolithogr. MEMS MOEMS,2012

4. Embedded capacitive displacement sensor for nanopositioning applications;Avramov-Zamurovic;Conference on Precision Electromagnetic Measurements (CPEM),2010

5. A low-noise low-offset capacitive sensing amplifier for a 50μg/√Hz monolithic CMOS MEMS accelerometer;Wu;IEEE J. Solid-State Circuits,2004

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