Author:
Kumar Parshant,Li Lihua,Calhoun Lynn,Boudreaux Paul,DeVoe Don
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference42 articles.
1. MOEMS modeling for optoeletromechanical co-simulations;Jacquemod;J. Model. Simulat. Microsyst.,1999
2. Fabrication of InP-based free standing micro structures by selective surface micromachining;Seassal;J. Micromech. Microeng.,1996
3. P. Viktorovitch, III–V semiconductor-based MOEMS, in: Proceedings of the SPIE Symposium on Design, Test, and Microfabrication of MEMS and MOEMS, vol. 3680, Paris, France, 1999, p. 30.
4. Improved free-standing semi insulating GaAs membranes for sensor applications;Miao;Electron. Lett.,1995
5. Sacrificial etching of III–V compounds for micromechanical devices;Hjort;J. Micromech. Microeng.,1996
Cited by
11 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献