Improved free-standing semi-insulating GaAs membranes for sensor applications
Author:
Publisher
Institution of Engineering and Technology (IET)
Subject
Electrical and Electronic Engineering
Link
https://digital-library.theiet.org/content/journals/10.1049/el_19950748?crawler=true&mimetype=application/pdf
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1. Fabrication of microstructures for integrated sensors on GaAs
2. Deep implantation of nitrogen into GaAs for selective three‐dimensional microstructuring
3. Piezoelectric properties of GaAs for application in stress transducers
4. The piezoelectric effect of GaAs used for resonators and resonant sensors
5. Thickness‐field excited thickness‐shear resonators in (110) GaAs
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