Author:
Seassal C,Leclercq J L,Viktorovitch P
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Cited by
47 articles.
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1. Materials: Silicon and beyond;Sensors and Actuators A: Physical;2019-09
2. Materials Aspects of Micro- and Nanoelectromechanical Systems;Springer Handbook of Nanotechnology;2017
3. Basic technologies for microsystems;Nano- and Microfabrication for Industrial and Biomedical Applications;2016
4. Fabrication challenges for indium phosphide microsystems;Journal of Micromechanics and Microengineering;2015-03-17
5. Design and Optical Properties of Electromechanical Double-Membrane Photonic Crystal Cavities;IEEE Journal of Quantum Electronics;2014-06