Author:
Vopilkin E. A.,Shashkin V. I.,Drozdov Yu. N.,Daniltsev V. M.,Klimov A. Yu.,Rogov V. V.,Shuleshova I. Yu.
Subject
Physics and Astronomy (miscellaneous)
Reference12 articles.
1. S. C. Masmanidis, R. B. Karabalin, I. De Vlaminsk, G. Borghs, M. R. Freeman, and M. L. Roukes, Science 317, 780 (2007).
2. A. Ongkodjodjo, F. Eng Hock Tay, and R. Akkipeddi, in Proceedings of the 18th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2005), Miami Beach, 2005, Vol. 14, pp. 610–618.
3. P. Kunar, L. Li, L. Calhoun, P. Boudreaux, and D. DeVoe, Sens. Actuators A 115, 96 (2004).
4. E. A. Vopilkin, V. I. Shashkin, Y. N. Drozdov, V. M. Daniltsev, S. A. Gusev, and I. Yu. Shuleshova, J. Micromech. Microeng. 18, 095006 (2008).
5. G. Abadal, et al., Nanotechnology 12, 100 (2001).
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