Author:
Ji Fan,Leppävuori Seppo,Luusua Ismo,Henttinen Kimmo,Eränen Simo,Hietanen Iiro,Juntunen Mikko
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
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5. Through wafer interconnects on active pMOS devices;Johnson,2004
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